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Beilstein J. Nanotechnol. 2018, 9, 2883–2892, doi:10.3762/bjnano.9.267
Figure 1: Cross-sectional Si plasmon-loss TEM images showing the Si NC formation in buried SiO2 layers of (a)...
Figure 2: Computer simulation of broad-beam ion mixing and nanocluster formation by thermal decomposition in ...
Figure 3: Comparison of different irradiation and thermal treatment conditions. In (a) and (b) low (85 Si+ nm...
Figure 4: Static TRIDYN-based simulation of the mixing efficiency for broad (a) and focused (b) beam irradiat...
Figure 5: Simulation of the formation of a single row of Si NCs by line irradiation. The sample is composed o...
Figure 6: Detection of a single Si NC in SiO2. (a) Si plasmon-loss filtered TEM image. A single Si NC (white)...